A 63 μg/√Hz Noise Floor and 14 pJ Power Efficiency Open-Loop MEMS Capacitive Accelerometer Using Closed-Loop Hybrid Dynamic Amplifier.
L. Zhong, S. Liu, D. Xu, and Z. Zhu. IEEE Trans. Circuits Syst. I Regul. Pap., 70 (4):
1531-1541(April 2023)
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