Author of the publication

A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology.

, , , , , , and . IEEE SENSORS, page 1-3. IEEE, (2016)

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

 

Other publications of authors with the same name

A study on young's modulus of electroplated gold cantilevers for MEMS devices., , , , , , , , and . NEMS, page 264-267. IEEE, (2017)Microelectromechanical XNOR and XOR logic devices., , and . IEICE Electron. Express, 10 (8): 20130187 (2013)A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology., , , , , , and . IEEE SENSORS, page 1-3. IEEE, (2016)Insole Pedometer With Piezoelectric Energy Harvester and 2 V Organic Circuits., , , , , , , , , and 4 other author(s). IEEE J. Solid State Circuits, 48 (1): 255-264 (2013)Integration of Chemical Sensors with LSI Technology - History and Applications -., , and . IEICE Trans. Electron., 95-C (5): 777-784 (2012)Transparent Thin Film Transistor electrode array for real-time Electrical Impedance Spectroscopy of cell cultures., , , , and . NEMS, page 379-383. IEEE, (2016)A design of integrated CMOS-MEMS infrared emitter arrays., and . IEICE Electron. Express, 13 (7): 20160009 (2016)Quarter Video Graphics Array Full-Digital Image Sensing with Wide Dynamic Range and Linear Output Using Pixel-Wise 3D Integration., , , , , , , , , and 1 other author(s). ISCAS, page 1-4. IEEE, (2018)A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design., , , , and . IEICE Electron. Express, 7 (24): 1785-1789 (2010)Self-assembly technique for MEMS vertical comb electrostatic actuator., , , , , and . IEICE Electron. Express, 2 (9): 311-315 (2005)