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Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance.

, , , , , и . IEEE Trans. Syst. Man Cybern. Syst., 49 (6): 1228-1240 (2019)

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Qiao-yan Ye

Yan Yan

Linhan Qiao

Miao Qiao

Wenchao Qiao

 

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