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Mechanical Fatigue on Gold MEMS Devices: Experimental Results

, , and . Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on, page 11--15. IEEE, (April 2008)
DOI: 10.1109/dtip.2008.4752942

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Mechanical Fatigue on Gold MEMS Devices: Experimental Results, , and . Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on, page 11--15. IEEE, (April 2008)