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Analysis and Design Considerations for Achieving the Fundamental Limits of Phase Noise in mmWave Oscillators with On-Chip MEMS Resonator., , , , , and . CoRR, (2020)Dielectrically Transduced Single-Ended to Differential MEMS Filter., , , and . ISSCC, page 1236-1243. IEEE, (2006)Shape optimization of solid-air porous phononic crystal slabs with widest full 3D bandgap for in-plane acoustic waves., , , , and . J. Comput. Phys., (2017)Record RF Performance of Ultra-thin Indium Oxide Transistors with Buried-gate Structure., , , , , and . DRC, page 1-2. IEEE, (2022)A Low Phase Noise 30 GHz Oscillator Topology for Resonant-Fin-Transistors Based High-Q On-chip Resonators in 14 nm Technology., , , and . VLSID, page 192-197. IEEE, (2022)16.8 1GHz GaN-MMIC monolithically integrated MEMS-based oscillators., , and . ISSCC, page 1-3. IEEE, (2015)Analysis and Design Considerations for Achieving the Fundamental Limits of Phase Noise in mmWave Oscillators With On-Chip MEMS Resonator., , , , , and . IEEE Trans. Circuits Syst. II Express Briefs, 68 (4): 1108-1112 (2021)Ultrathin Atomic-Layer-Deposited In2O3 Radio-Frequency Transistors with Record High fT of 36 GHz and BEOL Compatibility., , , , , and . VLSI Technology and Circuits, page 1-2. IEEE, (2023)32GHz resonant-fin transistors in 14nm FinFET technology., , , , and . ISSCC, page 348-350. IEEE, (2018)Solid state RF MEMS resonators in standard CMOS., , , and . ESSCIRC, page 249-252. IEEE, (2013)