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Design and control of a MEMS nanopositioner with bulk piezoresistive sensors.

, , and . CCA, page 1455-1460. IEEE, (2015)

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Piezoelectric bimorph actuator with integrated strain sensing electrodes., , , , and . IEEE SENSORS, page 1-3. IEEE, (2017)Nanopositioner design using tapered flexures: A parametric study., , and . AIM, page 856-861. IEEE, (2013)Control of a high-speed nanopositioner for Lissajous-scan video-rate AFM., , and . AuCC, page 171-176. IEEE, (2013)Design of Hybrid Piezoelectric/Piezoresistive Cantilevers for Dynamic-mode Atomic Force Microscopy., and . AIM, page 144-149. IEEE, (2018)Design and characterization of a miniature monolithic piezoelectric hexapod robot., , and . AIM, page 982-986. IEEE, (2016)Tracking of Triangular References Using Signal Transformation for Control of a Novel AFM Scanner Stage., , , and . IEEE Trans. Control. Syst. Technol., 20 (2): 453-464 (2012)Experimental Characterisation of Hydraulic Fiber-Reinforced Soft Actuators for Worm-Like Robots., , and . ICCMA, page 204-209. IEEE, (2019)Design and control of a MEMS nanopositioner with bulk piezoresistive sensors., , and . CCA, page 1455-1460. IEEE, (2015)Design, modeling, and characterization of an XY nanopositioning stage constructed from a single sheet of piezoelectric material., , and . AIM, page 1333-1338. IEEE, (2016)Image-Guided Locomotion of a Pneumatic-Driven Peristaltic Soft Robot., , and . ROBIO, page 2269-2274. IEEE, (2019)