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Design and analysis of the mechanical structure of a linear micromotor based on CMOS-MEMS technology., , , , , and . CCE, page 1-6. IEEE, (2019)Application and Resulting Suitability of a Genetic Algorithm in the Design of FGMOS-based CMOS-MEMS Transducers., , , , , and . CCE, page 1-5. IEEE, (2018)On Balanced Tradeoffs between Stiffness and Design Area in CMOS-MEMS Accelerometer Springs., , , , , and . CCE, page 1-4. IEEE, (2020)Proposal for a rotary micromotor structure based on CMOS-MEMS technology., , , , and . CCE, page 1-6. IEEE, (2020)Design of position sensor of a linear micromotor based on CMOS-MEMS technology., , , , and . CCE, page 1-6. IEEE, (2020)Micromotors unit based on CMOS-MEMS technology integrated on a single chip., , , , and . CCE, page 1-6. IEEE, (2021)Composition of Metal Layers in CMOS-MEMS Micromachining Process., , , , , and . CCE, page 1-4. IEEE, (2019)Proposal of a speed sensor based on FGMOS for a MEMS rotatory micromotor., , , , , and . CCE, page 1-6. IEEE, (2019)Basic readout circuit applied on FGMOS-based CMOS-MEMS inertial sensing prototypes., , , , and . CCE, page 1-6. IEEE, (2017)