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Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method.

, , , and . Sensors, 18 (8): 2443 (2018)

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A high sensitivity micromachined accelerometer with an enhanced inertial mass SOI MEMS process., , and . NEMS, page 336-339. IEEE, (2013)Ultra-flexible and highly transparent hydrogel-based triboelectric nanogenerator for physiological signal monitoring., , , , , , , , , and . NEMS, page 1903-1907. IEEE, (2021)A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers., , and . NEMS, page 253-256. IEEE Computer Society, (2009)Vibrational Energy Loss Analysis of a MEMS Disk Resonator Gyroscope., , and . AIM, page 385-390. IEEE, (2018)One MEMS Design Tool with Maximal Six Design Flows, , , , , and . CoRR, (2008)An integrated reduced micromachined inertial measurement unit for land vehicle navigation., , , , and . NEMS, page 201-204. IEEE, (2011)Wearable Device Oriented Flexible and Stretchable Energy Harvester Based on Embedded Liquid-Metal Electrodes and FEP Electret Film., , , and . Sensors, 20 (2): 458 (2020)Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method., , , and . Sensors, 18 (8): 2443 (2018)Low power-cost, Self-organized and Reconfigurable Control Strategy of Multi Sensors Inspired by Biological Mechanism for Target Detection., , , , , and . AIM, page 365-369. IEEE, (2018)First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope., , and . Sensors, 20 (22): 6455 (2020)