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Improvement of transient response for drive loop of microgyroscope using 2-DOF PID controller.

, , , , and . NEMS, page 281-284. IEEE, (2011)

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Fabrication and testing of a novel silicon probe for micromachined surface profilers., , , , and . NEMS, page 406-409. IEEE, (2011)A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer., , , , , , and . NEMS, page 421-425. IEEE, (2015)A temperature control system used for improving resonant frequency drift of MEMS gyroscopes., , , , , and . NEMS, page 397-400. IEEE, (2015)Residual stress characterization of GaN microstructures using bent-beam strain sensors., , , , , and . NEMS, page 138-140. IEEE, (2010)A capacitive readout circuit with DC sensing method for micromachined gyroscopes., , , , and . NEMS, page 712-715. IEEE, (2012)Post CMOS integration of high aspect ratio SOI MEMS devices., , , , and . NEMS, page 166-169. IEEE, (2011)A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors., , and . NEMS, page 583-586. IEEE, (2012)Non-Parallel Any-to-Many Voice Conversion by Replacing Speaker Statistics., , , , , and . Interspeech, page 1369-1373. ISCA, (2021)A novel acceleration switch with hat-like contact separated from proof mass., , , , , , and . NEMS, page 221-224. IEEE, (2011)Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm., , , , and . NEMS, page 1145-1148. IEEE, (2013)