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Simultaneous Sensing of Vapor Concentration and Temperature Utilizing Multimode of a MEMS Resonator.

, , , , and . IEEE SENSORS, page 1-4. IEEE, (2018)

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Smart Gas Sensing and Actuation Using Multimode of a MOFs Coated Microbeam., , , , and . IEEE SENSORS, page 1-4. IEEE, (2018)Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator., , , , , and . NEMS, page 290-295. IEEE, (2015)Highly Sensitive Resonant Bi-Directional Magnetic Field Micro-Sensor., , and . NEMS, page 425-428. IEEE, (2021)Theoretical Prediction of Experimental Jump and Pull-In Dynamics in a MEMS Sensor., , , and . Sensors, 14 (9): 17089-17111 (2014)Nanoelectromechanical resonator for logic operations., , , , , , and . NEMS, page 11-15. IEEE, (2017)In-Plane Air Damping of NEMS and MEMS Resonators., , , and . NEMS, page 225-228. IEEE, (2018)Mechanical Computing Using Multifrequency Excited NEMS Resonator., , , and . NEMS, page 229-233. IEEE, (2018)Global Dynamics of MEMS Resonators under Superharmonic Excitation., , and . ICMENS, page 694-699. IEEE Computer Society, (2004)Simultaneous Sensing of Vapor Concentration and Temperature Utilizing Multimode of a MEMS Resonator., , , , and . IEEE SENSORS, page 1-4. IEEE, (2018)Selective gas detection using conductivity-based MEMS resonator and machine learning., , , and . IEEE SENSORS, page 1-4. IEEE, (2022)