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Real-time control policy for single-arm cluster tools with residency time constraints and activity time variation by using Petri net., , and . ICNSC, page 34-39. IEEE, (2012)Manufacturing process reengineering for mass customization by using flexibility analysis., , and . SMC (6), page 5062-5067. IEEE, (2004)Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry., , , and . ICNSC, page 1-6. IEEE, (2016)Joint Specifics and Dual-Semantic Hashing Learning for Cross-Modal Retrieval., , , , , , and . Neurocomputing, (January 2024)An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements., , , , , and . IEEE Trans Autom. Sci. Eng., 19 (3): 1757-1771 (2022)Maximally Permissive Supervisor Synthesis Using Reachability and Structural Analysis of Petri Nets., , and . ICNSC, page 230-235. IEEE, (2019)Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools., , , and . CASE, page 862-867. IEEE, (2013)Optimizing close-down processes of single-robot cluster tools via linear programing., , , , and . CASE, page 148-153. IEEE, (2016)Scheduling of crude oil operations in refineries with least tank requirement., , and . CASE, page 243-248. IEEE, (2017)Liveness Enforcement for Time Petri Nets., , , , and . CoDIT, page 1184-1189. IEEE, (2022)