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Simulation modeling and visualization of start-up transient processes of dual-arm cluster tools with wafer revisiting.

, , , and . SMC, page 133-138. IEEE, (2014)

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Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints., , , and . IEEE Trans Autom. Sci. Eng., 12 (3): 1125-1139 (2015)Transient Process Optimization for Dual-Arm Cluster Tools With Wafer Revisiting., , , and . IEEE Access, (2021)A novel failure response policy for single-arm cluster tools with residency time constraints., , , and . SMC, page 120-126. IEEE, (2014)Schedulability analysis for dual-armed cluster tools with mixed-processing of multi-variety wafers., , and . ICNSC, page 501-506. IEEE, (2017)Reducing Wafer Delay Time by Robot Idle Time Regulation for Single-Arm Cluster Tools., , , , , and . IEEE Trans Autom. Sci. Eng., 18 (4): 1653-1667 (2021)Scheduling single-arm cluster tools with emergency order insertion., , , and . ICNSC, page 1-6. IEEE, (2022)A Novel Cyclic Scheduling Approach to Time-Constrained Single-Arm-Robot Multi-Cluster Tools., , , and . CASE, page 1628-1633. IEEE, (2022)Petri net-based deadlock avoidance for single-arm cluster tools with concurrently processing two-type wafers., , , , and . ICNSC, page 1-6. IEEE, (2018)Intelligent Scheduling Methods for Challenges of Cluster Tools with Concurrent Processing of Multiple Wafer Types., , and . CASE, page 173-178. IEEE, (2020)Modeling and scheduling of cluster tools dealing with wafer revisiting: A brief review., , , and . ICNSC, page 271-276. IEEE, (2015)