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Closed loop control for shape memory alloy actuators., , , and . SSD, page 1-6. IEEE, (2014)Radiometric effects in MEMS accelerometers., , , , , and . IEEE SENSORS, page 1-3. IEEE, (2017)System Level Simulations Of Mems Based On Reduced Order Finite Element Models., , and . International Journal of Computational Engineering Science, 4 (2): 385-388 (2003)CFD analysis of viscous losses in complex microsystems., , , and . SSD, page 1-4. IEEE, (2012)Nonlinear Model Order Reduction for high Q MEMS gyroscopes., , , , , , and . SSD, page 1-4. IEEE, (2014)Improved MEMS AE sensors in HARM technology., , , , and . SSD, page 1-4. IEEE, (2014)System Level Modeling of Piezoresistive Effect of Carbon Nanotubes for Sensor Application., , , , , , and . MBMV, page 205-208. Cuvillier, (2014)MEMS design for an efficient electrostatic energy harvester combined with components of precision mechanics., and . SSD, page 1-6. IEEE, (2012)Modal analysis of MEMS using ultrasonic base excitation., , , and . SSD, page 1-4. IEEE, (2012)MEMS acoustic emission sensor with mechanical noise rejection., , , , and . SSD, page 1-6. IEEE, (2012)