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Realization of Vibration Absorption at Multiple Frequencies on Vacuum Chamber with Cryopump.

, , , , , and . ASCC, page 699-703. IEEE, (2019)

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Improvement of vibration isolation characteristics by Kalman-filter estimated acceleration feedback., , , and . ECC, page 1106-1111. IEEE, (2015)Development of non-contact carrier system using solar magnetic suspension (3ed report: Continuous 5-day and installation of sloping propulsion mechanism)., , , , and . ASCC, page 1-5. IEEE, (2015)Force Compensation Based on Observer for Assembly of Magnetized Components., , , , and . ASCC, page 538-542. IEEE, (2019)Vibration Isolation System with Kalman Filter Estimated Acceleration Feedback: An Approach of Negative Stiffness Control., , , , and . J. Sensors, (2021)Stiffness control of magnetic suspension by local current feedback., , and . ECC, page 3881-3886. IEEE, (2009)Realization of acceleration feedback by using an active dynamic vibration absorber as a sensor in a low-frequency region., , , and . ECC, page 1681-1685. IEEE, (2015)Development of a three-axis active vibration isolation system using zero-power magnetic suspension., , , and . CDC, page 4493-4498. IEEE, (2003)Realization of Vibration Absorption at Multiple Frequencies on Vacuum Chamber with Cryopump., , , , , and . ASCC, page 699-703. IEEE, (2019)A 3-DOF modular vibration isolation system using zero-power magnetic suspension with adjustable negative stiffness., , , and . AMC, page 661-666. IEEE, (2010)Resonance frequency tracking control of ultrasonic transducer for diminished haptics., , , , and . ASCC, page 1240-1245. IEEE, (2017)