Author of the publication

Dry And Wet Etching With (111) Silicon For High-Performance Micro And Nano Systems.

, , , , , , , , and . International Journal of Computational Engineering Science, 4 (2): 181-187 (2003)

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

 

Other publications of authors with the same name

Extremely Sharp 111-Bound, Single-Crystalline Silicon Nano Tips., , , , , , , , , and . International Journal of Computational Engineering Science, 4 (2): 327-330 (2003)Dry And Wet Etching With (111) Silicon For High-Performance Micro And Nano Systems., , , , , , , , and . International Journal of Computational Engineering Science, 4 (2): 181-187 (2003)New Vertical Array Actuators Using Extended Sbm And Deep Pn Junction Isolation., , , , , , and . International Journal of Computational Engineering Science, 4 (3): 589-592 (2003)Novel Method for Nondestructive Body Effect Measurement in Dynamic Random Access Memory., , and . J. Electron. Test., 33 (5): 669-674 (2017)