%0 Conference Paper %1 conf/ieeesensors/KonishiSMYSMT16 %A Konishi, Toshifumi %A Safu, Teruaki %A Machida, Katsuyuki %A Yamane, Daisuke %A Sone, Masato %A Masu, Kazuya %A Toshiyoshi, Hiroshi %B IEEE SENSORS %D 2016 %I IEEE %K dblp %P 1-3 %T A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology. %U http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2016.html#KonishiSMYSMT16 %@ 978-1-4799-8287-5

@inproceedings{conf/ieeesensors/KonishiSMYSMT16, added-at = {2023-02-12T00:00:00.000+0100}, author = {Konishi, Toshifumi and Safu, Teruaki and Machida, Katsuyuki and Yamane, Daisuke and Sone, Masato and Masu, Kazuya and Toshiyoshi, Hiroshi}, biburl = {https://www.bibsonomy.org/bibtex/24e88111470820ad7250e5931cb4d78b2/dblp}, booktitle = {IEEE SENSORS}, crossref = {conf/ieeesensors/2016}, ee = {https://doi.org/10.1109/ICSENS.2016.7808793}, interhash = {4ff06092f98816ec205caad888c20f38}, intrahash = {4e88111470820ad7250e5931cb4d78b2}, isbn = {978-1-4799-8287-5}, keywords = {dblp}, pages = {1-3}, publisher = {IEEE}, timestamp = {2024-04-09T12:38:53.000+0200}, title = {A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology.}, url = {http://dblp.uni-trier.de/db/conf/ieeesensors/ieeesensors2016.html#KonishiSMYSMT16}, year = 2016 }