Author of the publication

A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology.

, , , , , , and . IEEE SENSORS, page 1-3. IEEE, (2016)

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

 

Other publications of authors with the same name

A 0.18-µm CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers., , , , , , , and . IEICE Electron. Express, 15 (2): 20171227 (2018)Challenges in integration of diverse functionalities on CMOS., , , , and . ASP-DAC, page 390-393. IEEE, (2013)A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology., , , , , , and . NEMS, page 419-422. IEEE, (2016)A mixed-design technique for integrated MEMS using a circuit simulator with HDL., , , and . MIXDES, page 17-22. IEEE, (2013)Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer., , , , , , and . Microelectron. Reliab., (2016)An ultra low power pH-monitoring IC with a duty-cycling wireless FM-transmitter., , , , , , , , , and . ISCAS, page 882-885. IEEE, (2014)A study on young's modulus of electroplated gold cantilevers for MEMS devices., , , , , , , , and . NEMS, page 264-267. IEEE, (2017)A Simplified Analytical Damping Constant Model for Perforated Proof Mass Structure of MEMS Capacitive Accelerometer by Multi-Layer Metal Technology., , , , , , , , and . IEEE SENSORS, page 1-4. IEEE, (2021)A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology., , , , , , and . IEEE SENSORS, page 1-3. IEEE, (2016)