%0 Journal Article %1 journals/jzusc/HanFLLL13 %A Han, Jianqiang %A sheng Feng, Ri %A Li, Yan %A lin Li, Sen %A Li, Qing %D 2013 %J Journal of Zhejiang University - Science C %K dblp %N 1 %P 65-74 %T Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers. %U http://dblp.uni-trier.de/db/journals/jzusc/jzusc14.html#HanFLLL13 %V 14

@article{journals/jzusc/HanFLLL13, added-at = {2016-12-31T00:00:00.000+0100}, author = {Han, Jianqiang and sheng Feng, Ri and Li, Yan and lin Li, Sen and Li, Qing}, biburl = {https://www.bibsonomy.org/bibtex/2bf48233bc844c700f3997297cb021994/dblp}, ee = {http://dx.doi.org/10.1631/jzus.C1200251}, interhash = {5870fd3c5b8c1030b4be455549f53d66}, intrahash = {bf48233bc844c700f3997297cb021994}, journal = {Journal of Zhejiang University - Science C}, keywords = {dblp}, number = 1, pages = {65-74}, timestamp = {2017-01-03T11:33:42.000+0100}, title = {Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers.}, url = {http://dblp.uni-trier.de/db/journals/jzusc/jzusc14.html#HanFLLL13}, volume = 14, year = 2013 }