%0 Conference Paper %1 conf/wsc/ParkACYKS13 %A Park, Sang C. %A Ahn, Euikoog %A Chung, Yongho %A ram Yang, Ka %A Kim, Byung H. %A Seo, Jeong C. %B WSC %D 2013 %I IEEE %K dblp %P 3840-3849 %T Fab simulation with recipe arrangement of tools. %U http://dblp.uni-trier.de/db/conf/wsc/wsc2013.html#ParkACYKS13

@inproceedings{conf/wsc/ParkACYKS13, added-at = {2021-06-10T00:00:00.000+0200}, author = {Park, Sang C. and Ahn, Euikoog and Chung, Yongho and ram Yang, Ka and Kim, Byung H. and Seo, Jeong C.}, biburl = {https://www.bibsonomy.org/bibtex/26520ee8a92666b0dc56baa5606148e73/dblp}, booktitle = {WSC}, crossref = {conf/wsc/2013}, ee = {http://dl.acm.org/citation.cfm?id=2675874}, interhash = {74e36b958e9c895a8eee456b913f8691}, intrahash = {6520ee8a92666b0dc56baa5606148e73}, keywords = {dblp}, pages = {3840-3849}, publisher = {IEEE}, timestamp = {2024-04-09T16:46:09.000+0200}, title = {Fab simulation with recipe arrangement of tools.}, url = {http://dblp.uni-trier.de/db/conf/wsc/wsc2013.html#ParkACYKS13}, year = 2013 }