%0 Journal Article %1 journals/mr/WagnerFSBMMP01 %A Wagner, Ulrich %A Franz, J. %A Schweiker, M. %A Bernhard, Winfried %A Müller-Fiedler, Roland %A Michel, Bernd %A Paul, Oliver %D 2001 %J Microelectron. Reliab. %K dblp %N 9-10 %P 1657-1662 %T Mechanical Reliability of MEMS-structures under shock load. %U http://dblp.uni-trier.de/db/journals/mr/mr41.html#WagnerFSBMMP01 %V 41

@article{journals/mr/WagnerFSBMMP01, added-at = {2020-02-22T00:00:00.000+0100}, author = {Wagner, Ulrich and Franz, J. and Schweiker, M. and Bernhard, Winfried and Müller-Fiedler, Roland and Michel, Bernd and Paul, Oliver}, biburl = {https://www.bibsonomy.org/bibtex/201c309fe4ce11810c245788a8b8261ac/dblp}, ee = {https://doi.org/10.1016/S0026-2714(01)00173-1}, interhash = {1785ded0af8392465616c86da3624699}, intrahash = {01c309fe4ce11810c245788a8b8261ac}, journal = {Microelectron. Reliab.}, keywords = {dblp}, number = {9-10}, pages = {1657-1662}, timestamp = {2020-02-25T13:29:47.000+0100}, title = {Mechanical Reliability of MEMS-structures under shock load.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr41.html#WagnerFSBMMP01}, volume = 41, year = 2001 }