%0 Conference Paper %1 conf/3dic/YanZCZCD16 %A Yan, Yangyang %A Zhang, Ziyue %A Cheng, Zhiqiang %A Zhou, Lingfeng %A Chen, Zhiming %A Ding, Yingtao %B 3DIC %D 2016 %I IEEE %K dblp %P 1-5 %T Low cost polyimide liner formation with vacuum-assisted spin coating for through-silicon-vias. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2016.html#YanZCZCD16 %@ 978-1-5090-1399-9

@inproceedings{conf/3dic/YanZCZCD16, added-at = {2022-10-02T00:00:00.000+0200}, author = {Yan, Yangyang and Zhang, Ziyue and Cheng, Zhiqiang and Zhou, Lingfeng and Chen, Zhiming and Ding, Yingtao}, biburl = {https://www.bibsonomy.org/bibtex/2576cb2812e791e5f145cd96d988c1d25/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2016}, ee = {https://doi.org/10.1109/3DIC.2016.7970040}, interhash = {8e78f86007c0d15b2f3faccbb1705940}, intrahash = {576cb2812e791e5f145cd96d988c1d25}, isbn = {978-1-5090-1399-9}, keywords = {dblp}, pages = {1-5}, publisher = {IEEE}, timestamp = {2024-04-10T12:11:01.000+0200}, title = {Low cost polyimide liner formation with vacuum-assisted spin coating for through-silicon-vias.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2016.html#YanZCZCD16}, year = 2016 }