%0 Conference Paper %1 conf/nems/ChenZZXX13 %A Chen, Qiao %A Zhang, Hao %A Zhang, Xiaoyang %A Xu, Dacheng %A Xie, Huikai %B NEMS %D 2013 %I IEEE %K dblp %P 817-820 %T Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ChenZZXX13

@inproceedings{conf/nems/ChenZZXX13, added-at = {2018-11-02T00:00:00.000+0100}, author = {Chen, Qiao and Zhang, Hao and Zhang, Xiaoyang and Xu, Dacheng and Xie, Huikai}, biburl = {https://www.bibsonomy.org/bibtex/2084012a6365151111507bb973f86de07/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {https://doi.org/10.1109/NEMS.2013.6559850}, interhash = {b8ebfb7f05a99ec5457740958ae204b5}, intrahash = {084012a6365151111507bb973f86de07}, keywords = {dblp}, pages = {817-820}, publisher = {IEEE}, timestamp = {2019-10-17T22:13:37.000+0200}, title = {Repeatability study of 2D MEMS mirrors based on S-shaped Al/SiO2 bimorphs.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#ChenZZXX13}, year = 2013 }