%0 Journal Article %1 journals/ijat/KimuraKOS11 %A Kimura, Keiichi %A Khajornrungruang, Panart %A Okuzono, Takahisa %A Suzuki, Keisuke %D 2011 %J IJAT %K dblp %N 2 %P 173-178 %T Evaluation Method Applying Fourier Transform Analysis for Conditioned Polishing Pad Surface Topography. %U http://dblp.uni-trier.de/db/journals/ijat/ijat5.html#KimuraKOS11 %V 5

@article{journals/ijat/KimuraKOS11, added-at = {2016-12-21T00:00:00.000+0100}, author = {Kimura, Keiichi and Khajornrungruang, Panart and Okuzono, Takahisa and Suzuki, Keisuke}, biburl = {https://www.bibsonomy.org/bibtex/2fae5e09f19fdc833b85cd03dabb0f978/dblp}, ee = {http://dx.doi.org/10.20965/ijat.2011.p0173}, interhash = {ebb0ded8ac24e519b988a98ab4d86e7d}, intrahash = {fae5e09f19fdc833b85cd03dabb0f978}, journal = {IJAT}, keywords = {dblp}, number = 2, pages = {173-178}, timestamp = {2016-12-22T11:33:52.000+0100}, title = {Evaluation Method Applying Fourier Transform Analysis for Conditioned Polishing Pad Surface Topography.}, url = {http://dblp.uni-trier.de/db/journals/ijat/ijat5.html#KimuraKOS11}, volume = 5, year = 2011 }