%0 Journal Article %1 journals/micromachines/FukushimaKIKKMBLTK11 %A Fukushima, Takafumi %A Konno, Takayuki %A Iwata, Eiji %A Kobayashi, Risato %A Kojima, Toshiya %A Murugesan, Mariappan %A Bea, Ji Chel %A Lee, Kang Wook %A Tanaka, Tetsu %A Koyanagi, Mitsumasa %D 2011 %J Micromachines %K dblp %N 1 %P 49-68 %T Self-Assembly of Chip-Size Components with Cavity Structures: High-Precision Alignment and Direct Bonding without Thermal Compression for Hetero Integration. %U http://dblp.uni-trier.de/db/journals/micromachines/micromachines2.html#FukushimaKIKKMBLTK11 %V 2

@article{journals/micromachines/FukushimaKIKKMBLTK11, added-at = {2021-02-16T00:00:00.000+0100}, author = {Fukushima, Takafumi and Konno, Takayuki and Iwata, Eiji and Kobayashi, Risato and Kojima, Toshiya and Murugesan, Mariappan and Bea, Ji Chel and Lee, Kang Wook and Tanaka, Tetsu and Koyanagi, Mitsumasa}, biburl = {https://www.bibsonomy.org/bibtex/2315b16e6e8cedbb648277fad79324fdc/dblp}, ee = {https://doi.org/10.3390/mi2010049}, interhash = {73e167a3a88fc4f9206fb84a5f15e943}, intrahash = {315b16e6e8cedbb648277fad79324fdc}, journal = {Micromachines}, keywords = {dblp}, number = 1, pages = {49-68}, timestamp = {2024-04-08T19:44:18.000+0200}, title = {Self-Assembly of Chip-Size Components with Cavity Structures: High-Precision Alignment and Direct Bonding without Thermal Compression for Hetero Integration.}, url = {http://dblp.uni-trier.de/db/journals/micromachines/micromachines2.html#FukushimaKIKKMBLTK11}, volume = 2, year = 2011 }