%0 Conference Paper %1 conf/3dic/BeaMONKLFTK09 %A Bea, Ji Chel %A Murugesan, Mariappan %A Ohara, Yuki %A Noriki, Akihiro %A Kino, Hisashi %A Lee, Kang Wook %A Fukushima, Takafumi %A Tanaka, Tetsu %A Koyanagi, Mitsumasa %B 3DIC %D 2009 %I IEEE %K dblp %P 1-5 %T Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration. %U http://dblp.uni-trier.de/db/conf/3dic/3dic2009.html#BeaMONKLFTK09 %@ 978-1-4244-4512-7

@inproceedings{conf/3dic/BeaMONKLFTK09, added-at = {2023-09-30T00:00:00.000+0200}, author = {Bea, Ji Chel and Murugesan, Mariappan and Ohara, Yuki and Noriki, Akihiro and Kino, Hisashi and Lee, Kang Wook and Fukushima, Takafumi and Tanaka, Tetsu and Koyanagi, Mitsumasa}, biburl = {https://www.bibsonomy.org/bibtex/26982d77362ee785bac4c87f82fccfb5e/dblp}, booktitle = {3DIC}, crossref = {conf/3dic/2009}, ee = {https://doi.org/10.1109/3DIC.2009.5306568}, interhash = {823d6574c99e985fa0626cac06986c07}, intrahash = {6982d77362ee785bac4c87f82fccfb5e}, isbn = {978-1-4244-4512-7}, keywords = {dblp}, pages = {1-5}, publisher = {IEEE}, timestamp = {2024-04-10T12:10:49.000+0200}, title = {Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration.}, url = {http://dblp.uni-trier.de/db/conf/3dic/3dic2009.html#BeaMONKLFTK09}, year = 2009 }