%0 Conference Paper %1 conf/nems/SoulimanePBJBDP13 %A Soulimane, Sofiane %A Pouydebasque, Arnaud %A Bolis, Sébastien %A Jacquet, Fabrice %A Bridoux, Claudine %A Dupont, Florian %A Poulain, Christophe %A Moreau, Stéphane %A Fanget, Stephane %B NEMS %D 2013 %I IEEE %K dblp %P 486-489 %T A new experimental methodology using point deflection to quantify residual stress of thin polymer membrane materials in MEMS devices. %U http://dblp.uni-trier.de/db/conf/nems/nems2013.html#SoulimanePBJBDP13

@inproceedings{conf/nems/SoulimanePBJBDP13, added-at = {2018-11-02T00:00:00.000+0100}, author = {Soulimane, Sofiane and Pouydebasque, Arnaud and Bolis, Sébastien and Jacquet, Fabrice and Bridoux, Claudine and Dupont, Florian and Poulain, Christophe and Moreau, Stéphane and Fanget, Stephane}, biburl = {https://www.bibsonomy.org/bibtex/26c45c325c8d7da6d0f18510085f0db04/dblp}, booktitle = {NEMS}, crossref = {conf/nems/2013}, ee = {https://doi.org/10.1109/NEMS.2013.6559776}, interhash = {0e16bc434246e189b401a9739d60f84f}, intrahash = {6c45c325c8d7da6d0f18510085f0db04}, keywords = {dblp}, pages = {486-489}, publisher = {IEEE}, timestamp = {2019-10-17T22:13:37.000+0200}, title = {A new experimental methodology using point deflection to quantify residual stress of thin polymer membrane materials in MEMS devices.}, url = {http://dblp.uni-trier.de/db/conf/nems/nems2013.html#SoulimanePBJBDP13}, year = 2013 }