%0 Journal Article %1 Khodin20092552 %A Khodin, A. %A Joong-Kee, Lee %A Chang-Sam, Kim %A Sang-Ok, Kim %D 2009 %J Materials Letters %K aempl %N 29 %P 2552 - 2555 %R http://dx.doi.org/10.1016/j.matlet.2009.09.002 %T Nanomorph silicon grown on template alumina substrate by plasma-enhanced \CVD\ %U http://www.sciencedirect.com/science/article/pii/S0167577X09006685 %V 63 %X Novel morphology of amorphous/nanocrystalline (nanomorph) silicon has been obtained by plasma enhanced \CVD\ using template porous alumina substrate. The growing heterogeneous Si layer is composed of nanocrystalline and amorphous distinct areas, conformal to the tipped/ribbed alumina template. Raman spectroscopy and \XRD\ data evidence the plasma-assisted preferential growth of nanocrystalline Si bunches forming the honeycomb net and presumably amorphous Si:H areas between them.

@article{Khodin20092552, abstract = {Novel morphology of amorphous/nanocrystalline (nanomorph) silicon has been obtained by plasma enhanced \{CVD\} using template porous alumina substrate. The growing heterogeneous Si layer is composed of nanocrystalline and amorphous distinct areas, conformal to the tipped/ribbed alumina template. Raman spectroscopy and \{XRD\} data evidence the plasma-assisted preferential growth of nanocrystalline Si bunches forming the honeycomb net and presumably amorphous Si:H areas between them. }, added-at = {2015-10-08T06:31:54.000+0200}, author = {Khodin, A. and Joong-Kee, Lee and Chang-Sam, Kim and Sang-Ok, Kim}, biburl = {https://www.bibsonomy.org/bibtex/27c68578afe36abdecc406678f193faa5/l1th1um}, description = {Nanomorph silicon grown on template alumina substrate by plasma-enhanced CVD}, doi = {http://dx.doi.org/10.1016/j.matlet.2009.09.002}, interhash = {9d9665e3a5b0b910e4729253ddb13ebd}, intrahash = {7c68578afe36abdecc406678f193faa5}, issn = {0167-577X}, journal = {Materials Letters }, keywords = {aempl}, number = 29, pages = {2552 - 2555}, timestamp = {2015-10-08T06:31:54.000+0200}, title = {Nanomorph silicon grown on template alumina substrate by plasma-enhanced \{CVD\} }, url = {http://www.sciencedirect.com/science/article/pii/S0167577X09006685}, volume = 63, year = 2009 }