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%0 Journal Article
%1 journals/tsmc/LauTLLH09
%A Lau, Henry C. W.
%A Tang, Cassandra X. H.
%A Leung, B. P. K.
%A Lee, Carman K. M.
%A Ho, George T. S.
%D 2009
%J IEEE Trans. Syst. Man Cybern. Part A
%K dblp
%N 4
%P 933-938
%T A Performance Tradeoff Function for Evaluating Suggested Parameters in the Reactive Ion Etching Process.
%U http://dblp.uni-trier.de/db/journals/tsmc/tsmca39.html#LauTLLH09
%V 39
@article{journals/tsmc/LauTLLH09,
added-at = {2020-05-25T00:00:00.000+0200},
author = {Lau, Henry C. W. and Tang, Cassandra X. H. and Leung, B. P. K. and Lee, Carman K. M. and Ho, George T. S.},
biburl = {https://www.bibsonomy.org/bibtex/21a75f7c666c8e4c7318a8cfcdc9635f5/dblp},
ee = {https://doi.org/10.1109/TSMCA.2009.2019877},
interhash = {a02f2f33f4e80dc6e6ebe0d0295dcff1},
intrahash = {1a75f7c666c8e4c7318a8cfcdc9635f5},
journal = {IEEE Trans. Syst. Man Cybern. Part A},
keywords = {dblp},
number = 4,
pages = {933-938},
timestamp = {2020-05-26T11:47:27.000+0200},
title = {A Performance Tradeoff Function for Evaluating Suggested Parameters in the Reactive Ion Etching Process.},
url = {http://dblp.uni-trier.de/db/journals/tsmc/tsmca39.html#LauTLLH09},
volume = 39,
year = 2009
}