%0 Journal Article %1 journals/tsmc/LauTLLH09 %A Lau, Henry C. W. %A Tang, Cassandra X. H. %A Leung, B. P. K. %A Lee, Carman K. M. %A Ho, George T. S. %D 2009 %J IEEE Trans. Syst. Man Cybern. Part A %K dblp %N 4 %P 933-938 %T A Performance Tradeoff Function for Evaluating Suggested Parameters in the Reactive Ion Etching Process. %U http://dblp.uni-trier.de/db/journals/tsmc/tsmca39.html#LauTLLH09 %V 39

@article{journals/tsmc/LauTLLH09, added-at = {2020-05-25T00:00:00.000+0200}, author = {Lau, Henry C. W. and Tang, Cassandra X. H. and Leung, B. P. K. and Lee, Carman K. M. and Ho, George T. S.}, biburl = {https://www.bibsonomy.org/bibtex/21a75f7c666c8e4c7318a8cfcdc9635f5/dblp}, ee = {https://doi.org/10.1109/TSMCA.2009.2019877}, interhash = {a02f2f33f4e80dc6e6ebe0d0295dcff1}, intrahash = {1a75f7c666c8e4c7318a8cfcdc9635f5}, journal = {IEEE Trans. Syst. Man Cybern. Part A}, keywords = {dblp}, number = 4, pages = {933-938}, timestamp = {2020-05-26T11:47:27.000+0200}, title = {A Performance Tradeoff Function for Evaluating Suggested Parameters in the Reactive Ion Etching Process.}, url = {http://dblp.uni-trier.de/db/journals/tsmc/tsmca39.html#LauTLLH09}, volume = 39, year = 2009 }