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%0 Journal Article
%1 journals/mr/PaskalevaLZBFR03
%A Paskaleva, Albena
%A Lemberger, Martin
%A Zürcher, Stefan
%A Bauer, Anton J.
%A Frey, Lothar
%A Ryssel, Heiner
%D 2003
%J Microelectron. Reliab.
%K dblp
%N 8
%P 1253-1257
%T Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors.
%U http://dblp.uni-trier.de/db/journals/mr/mr43.html#PaskalevaLZBFR03
%V 43
@article{journals/mr/PaskalevaLZBFR03,
added-at = {2020-10-26T00:00:00.000+0100},
author = {Paskaleva, Albena and Lemberger, Martin and Zürcher, Stefan and Bauer, Anton J. and Frey, Lothar and Ryssel, Heiner},
biburl = {https://www.bibsonomy.org/bibtex/21750449e602db6b361fcb05dc9198ab1/dblp},
ee = {https://doi.org/10.1016/S0026-2714(03)00180-X},
interhash = {a5f11f6f364a6294c9efd5f4679f126a},
intrahash = {1750449e602db6b361fcb05dc9198ab1},
journal = {Microelectron. Reliab.},
keywords = {dblp},
number = 8,
pages = {1253-1257},
timestamp = {2020-10-27T12:44:52.000+0100},
title = {Electrical characterization of zirconium silicate films obtained from novel MOCVD precursors.},
url = {http://dblp.uni-trier.de/db/journals/mr/mr43.html#PaskalevaLZBFR03},
volume = 43,
year = 2003
}