%0 Journal Article %1 journals/tcad/YangLPZYZZ16 %A Yang, Yunfeng %A Luk, Wai-Shing %A Pan, David Z. %A Zhou, Hai %A Yan, Changhao %A Zhou, Dian %A Zeng, Xuan %D 2016 %J IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. %K dblp %N 9 %P 1532-1545 %T Layout Decomposition Co-Optimization for Hybrid E-Beam and Multiple Patterning Lithography. %U http://dblp.uni-trier.de/db/journals/tcad/tcad35.html#YangLPZYZZ16 %V 35

@article{journals/tcad/YangLPZYZZ16, added-at = {2023-08-16T00:00:00.000+0200}, author = {Yang, Yunfeng and Luk, Wai-Shing and Pan, David Z. and Zhou, Hai and Yan, Changhao and Zhou, Dian and Zeng, Xuan}, biburl = {https://www.bibsonomy.org/bibtex/25f358b04aa55d178bdda535ee8f72aab/dblp}, ee = {https://doi.org/10.1109/TCAD.2015.2512903}, interhash = {bfa22bd56c60ace48dc52f14f67de202}, intrahash = {5f358b04aa55d178bdda535ee8f72aab}, journal = {IEEE Trans. Comput. Aided Des. Integr. Circuits Syst.}, keywords = {dblp}, number = 9, pages = {1532-1545}, timestamp = {2024-04-08T19:45:50.000+0200}, title = {Layout Decomposition Co-Optimization for Hybrid E-Beam and Multiple Patterning Lithography.}, url = {http://dblp.uni-trier.de/db/journals/tcad/tcad35.html#YangLPZYZZ16}, volume = 35, year = 2016 }