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La-doped ZrO2 based BEoL decoupling capacitors.

, , , , , , , и . ICICDT, стр. 1-4. IEEE, (2016)

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Cheng-Yung Cheng

Ying Min Cheng

I-Fen Cheng

Yao Cheng

Qing-Qi Cheng

 

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