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The role of process system engineering (PSE) in integrated circuit (IC) manufacturing

, , и . Control Engineering Practice, 15 (7): 793--802 (июля 2006)Special Issue on Award Winning Applications, 2005 IFAC World Congress.
DOI: doi:10.1016/j.conengprac.2006.04.003

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Daniel Lewin

Daniel Lewin

Daniel Lewin

Daniel Lewin

Daniel R Streett

 

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