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A 3µW, 2 MHz CMOS frequency reference for capacitive sensor applications., , , and . ISCAS, IEEE, (2006)A micropower 2 MHz CMOS frequency reference for capacitive sensor applications., , , and . ECCTD, page 425-428. IEEE, (2005)A Micropower Front End for Three-Axis Capacitive Microaccelerometers., , , , , and . IEEE Trans. Instrumentation and Measurement, 58 (10): 3642-3652 (2009)A 1.5μW 1V 2nd-Order ΔΣ Sensor Front-End with Signal Boosting and Offset Compensation for a Capacitive 3-Axis Micro-Accelerometer., , , , , , and . ISSCC, page 578-579. IEEE, (2008)A 62μA Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer., , , , , and . ISSCC, page 318-605. IEEE, (2007)A Micropower Voltage, Current, and Temperature Reference for a Low-Power Capacitive Sensor Interface., , , and . ISCAS, page 3067-3070. IEEE, (2007)A micropower low-dropout regulator with a programmable on-chip load capacitor for a low-power capacitive sensor interface., , , and . ICECS, page 450-453. IEEE, (2008)A 2.2 mA 4.3 mm 2 ASIC for a 1000°/s 2-Axis Capacitive Micro-Gyroscope., , , , , and . IEEE J. Solid State Circuits, 46 (7): 1682-1692 (2011)A Micropower Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer., , , , , and . IEEE J. Solid State Circuits, 42 (12): 2651-2665 (2007)A Micropower ΔΣ-Based Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer., , , , , , and . IEEE J. Solid State Circuits, 44 (11): 3193-3210 (2009)