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Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology.

, , , , , and . Microelectron. J., 38 (1): 120-124 (2007)

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High performance MEMS spiral inductors., , , , , and . NEMS, page 1033-1035. IEEE, (2010)Surface micromachined RF MEMS variable capacitor., , , , and . Microelectron. J., 38 (8-9): 855-859 (2007)Spiral capacitor based on copper electroplating., , , , and . NEMS, page 432-435. IEEE Computer Society, (2009)Fabrication and performance of a micromachined 3-D solenoid inductor., , , and . Microelectron. J., 37 (9): 948-951 (2006)Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors., , , , , and . Sensors, 12 (4): 5105-5115 (2012)Electrodeposition and characterization of CoNiMnP-based permanent magnetic film for MEMS applications., , , and . NEMS, page 367-371. IEEE, (2011)Tunable MEMS capacitors considering deformation factor., , and . NEMS, page 25-28. IEEE Computer Society, (2009)High efficiency coupling with stacked MEMS coils., , , , , and . NEMS, page 509-512. IEEE, (2010)Electro-thermally actuated RF MEMS switch for wireless communication., , , , , , , and . NEMS, page 497-500. IEEE, (2010)Design, fabrication and performance of a new vibration-based electromagnetic micro power generator., , , and . Microelectron. J., 38 (12): 1175-1180 (2007)