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A Zirconium Dioxide Ammonia Microsensor Integrated with a Readout Circuit Manufactured Using the 0.18 μm CMOS Process., , and . Sensors, 13 (3): 3664-3674 (2013)Fabrication and Characterization of Polyaniline/PVA Humidity Microsensors., , and . Sensors, 11 (8): 8143-8151 (2011)Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique., , , and . Sensors, 9 (2): 869-880 (2009)Implementation and analysis of microwave switch in CMOS-MEMS technology., , , , and . ISCAS, IEEE, (2006)Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology., , and . Micromachines, 6 (11): 1645-1654 (2015)Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology., , and . Micromachines, 6 (10): 1560-1568 (2015)Fabrication and characterization of a microelectromechanical tunable capacitor., , and . Microelectron. J., 38 (12): 1257-1262 (2007)Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip., , , and . Sensors, 9 (12): 10158-10170 (2009)Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique., and . Sensors, 15 (1): 1623-1634 (2015)Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip., , and . Sensors, 14 (11): 20360-20371 (2014)