Author of the publication

Silicon nitride etch characteristics in SF6/O2 and C3F6O/O2 plasmas and evaluation of their global warming effects.

, , , , , and . Microelectron. Reliab., 52 (12): 2970-2974 (2012)

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

 

Other publications of authors with the same name

A gravitational-wave standard siren measurement of the Hubble constant, , , , , , , , , and 1304 other author(s). (2017)cite arxiv:1710.05835Comment: 26 pages, 5 figures, Nature in press. For more information see https://dcc.ligo.org/LIGO-P1700296/public.Observation of gravitational waves from two neutron star-black hole coalescences, , , , , , , , , and 1592 other author(s). (2021)cite arxiv:2106.15163.Development of an extraction method for mycobacterial metabolome analysis., , , and . Journal of pharmaceutical and biomedical analysis, (April 2006)Fuzzy neurons and fuzzy multilinear mappings., , and . ICNN, page 543-547. IEEE, (1997)InGaAs inversion layers band structure, electrostatics, and mobility modeling based on 8 Band k · p theory., , , , , , , and . ESSDERC, page 114-117. IEEE, (2014)Properties and astrophysical implications of the 150 Msun binary black hole merger GW190521, , , , , , , , , and 1248 other author(s). (2020)cite arxiv:2009.01190Comment: 39 pages, 13 figures; data available at https://dcc.ligo.org/P2000158-v4/public.Silicon nitride etch characteristics in SF6/O2 and C3F6O/O2 plasmas and evaluation of their global warming effects., , , , , and . Microelectron. Reliab., 52 (12): 2970-2974 (2012)Einstein@Home all-sky search for periodic gravitational waves in LIGO S5 data, , , , , , , , , and 789 other author(s). Phys. Rev. D, 87 (4): 042001 (February 2013)A methodology of constructing a decision path for IT investment., , , and . J. Strateg. Inf. Syst., 9 (1): 17-38 (2000)GW190521: A Binary Black Hole Merger with a Total Mass of $150 ~ M_ødot$, , , , , , , , , and 1247 other author(s). (2020)cite arxiv:2009.01075Comment: Supplementary Material at https://dcc.ligo.org/LIGO-P2000020/Public.