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Evaluation of Thin Film Material for Micromechanisms.

, and . J. Robotics Mechatronics, 3 (1): 8-11 (1991)

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Design of a small-scale tactile sensor with three sensing points for using in robotic fingertips., , , and . ICRA, page 4855-4860. IEEE, (2010)Development and Analysis of a Sliding Tactile Soft Fingertip Embedded With a Microforce/Moment Sensor., , , and . IEEE Trans. Robotics, 27 (3): 411-424 (2011)Force/moment sensing during sliding motion using a micro sensor embedded in a soft fingertip., , , and . ICARCV, page 161-166. IEEE, (2008)Development of Passive Elements with Variable Mechanical Impedance for Wearable Robots., , , , , , and . ICRA, page 248-253. IEEE, (2002)Development of electrothermal microactuator using a low environmental load polymer., and . MHS, page 1-5. IEEE, (2013)Analysis of sliding of a soft fingertip embedded with a novel micro force/moment sensor: Simulation, experiment, and application., , , and . ICRA, page 889-894. IEEE, (2009)Design & Fabrication of Piezoresistive Six Degree of Freedom Accelerometer for Biomechanical Applications., , , and . ICMENS, page 148-154. IEEE Computer Society, (2004)Evaluation of Thin Film Material for Micromechanisms., and . J. Robotics Mechatronics, 3 (1): 8-11 (1991)Vacuum-sealed silicon micromachined pressure sensors., , , , and . Proc. IEEE, 86 (8): 1627-1639 (1998)Integrated CNTs thin film for MEMS mechanical sensors., , , , , and . Microelectron. J., 41 (12): 860-864 (2010)