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Modeling and design of electrostatic voltage sensors based on micromachined torsional actuators, , and . 3, page 521-524. NSTI Nanotech, Boston, MA, (June 2008)Micro-Electromechanical devices for RF voltage metrology applications, , and . page 322-324. ACTUATOR 2008, 1th International Conference on New Actuators, Bremen, Germany, (June 2008)A miniaturized RMS voltage sensor based on a torsional actuator in bulk silicon technology, , and . Microelectronic Engineering, (2008)Optimization of spring geometries for the suspension of an electrostatic RMS voltage sensor, , and . page 177-180. The International Conference on MEMS and Nanotechnology, Kuala Lumpur, Malaysia, (May 2008)Micro-fabricated electrostatic voltage sensor with a thin bulk-silicon device layer, , and . 1, page 472-475. NSTI Nanotech 2009, Houston, TX, (May 2009)Aufbau und Charakterisierung eines mikro-elektromechanischen Torsionssensors für die Hochfrequenzspannungsmessung, , and . Mikrosystemtechnik Kongress 2007, Dresden, page 775-758. VDE Verlag GmbH, (October 2007)A torsional sensor for MEMS-based RMS voltage measurements, , and . Advances in Radio Science, (2008)Specialized hybrid batch fabrication process for MEMS RF voltage sensors, , and . page 680000P-1-680000P-9. SPIE Microelectronics, MEMS, and Nanotechnology, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology, Canberra, Australia, (December 2007)A miniaturized RMS voltage sensor based on a torsional actuator in bulk silicon technology, , and . page 769-770. Micro- and Nano Engineering, Kopenhagen, (September 2007)