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Investigation of Ga2O3-Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System.

, , , , , и . Sensors, 20 (21): 6159 (2020)

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Ying Ying

Dei-Ying Willy Lee

Sin Ying Tina Lee

Wenjung Hsing

Chi-Wu Hsing

 

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