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8×8 Programmable Multi-Beam Pattern Projection Based on Multicast Silicon Photonic MEMS Switches.

, , , , , , , , , , and . OFC, page 1-3. IEEE, (2021)

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8×8 Programmable Multi-Beam Pattern Projection Based on Multicast Silicon Photonic MEMS Switches., , , , , , , , , and 1 other author(s). OFC, page 1-3. IEEE, (2021)Dataset for "Review of MEMS for photonic integrated circuits": table for reported key figures., , , , , and . (September 2019)11.8 Chip-scale electro-optical 3D FMCW lidar with 8µm ranging precision., , , , , , and . ISSCC, page 214-216. IEEE, (2016)Large-port-count MEMS silicon photonics switches., , , and . OFC, page 1-3. IEEE, (2015)50×50 digital silicon photonic switches with MEMS-actuated adiabatic couplers., , , and . OFC, page 1-3. IEEE, (2015)Monolithic 50×50 MEMS silicon photonic switches with microsecond response time., , , , and . OFC, page 1-3. IEEE, (2014)Electronic-Photonic Integrated Circuit for 3D Microimaging., , , , , , and . IEEE J. Solid State Circuits, 52 (1): 161-172 (2017)64×64 Low-loss and broadband digital silicon photonic MEMS switches., , , , , and . ECOC, page 1-3. IEEE, (2015)Silicon Photonic MEMS: Exploiting Mechanics at the Nanoscale to Enhance Photonic Integrated Circuits., , , , , , , , , and 8 other author(s). OFC, page 1-3. IEEE, (2019)Silicon Photonic MEMS Add-Drop Filter., , , , , , and . ECOC, page 1-4. IEEE, (2020)