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Double-cantilever device for Atomic Force Microscopy in dynamic noncontact-mode.

, , , , , , and . Microelectron. Reliab., 42 (9-11): 1685-1688 (2002)

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System Level Modeling of Piezoresistive Effect of Carbon Nanotubes for Sensor Application., , , , , , and . MBMV, page 205-208. Cuvillier, (2014)Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems., , , , , , and . NEMS, page 595-599. IEEE, (2016)Direct integration of field effect transistors as electro mechanical transducer for stress., , , , , , and . ICST, page 379-382. IEEE, (2013)Sonderforschungsbereich 379 "Mikromechanische Sensor- und Aktorarrays". Grundlagenforschung mit Anwendungsbezug auf dem Gebiet der Mikrosystemtechnik an der TU Chemnitz., , , and . Informationstechnik Tech. Inform., 43 (5): 282-286 (2001)Band gap tuning of carbon nanotubes for sensor and interconnect applications - A quantum simulation study., , , , , , and . SSD, page 1-5. IEEE, (2012)Nanomechanics of CNTs for sensor application., , , , , and . SSD, page 1-5. IEEE, (2012)Structuring of carbon nanotubes for field emission based movement sensors., , , , and . SSD, page 1-3. IEEE, (2012)Advanced Silicon Micromachining., , , , and . International Journal of Computational Engineering Science, 4 (2): 151 (2003)Numerical Methods, Simulations and Visualization for Compressible Flows., , and . VisMath, page 347-356. Springer, (1995)Deposition of Parylene C and characterization of its hermeticity for the encapsulation of MEMS and medical devices., , , and . NEMS, page 427-432. IEEE, (2016)