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Research on the Zero-Rate Output compensation for MEMS vibratory gyroscopes.

, , , , , and . NEMS, page 804-807. IEEE, (2017)

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Fabrication and testing of a novel silicon probe for micromachined surface profilers., , , , and . NEMS, page 406-409. IEEE, (2011)A temperature control system used for improving resonant frequency drift of MEMS gyroscopes., , , , , and . NEMS, page 397-400. IEEE, (2015)A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer., , , , , , and . NEMS, page 421-425. IEEE, (2015)Residual stress characterization of GaN microstructures using bent-beam strain sensors., , , , , and . NEMS, page 138-140. IEEE, (2010)A Low-Noise High-G Closed-Loop Capacitive Accelerometer Using DC-Blocking Technique for Reduction of Power Dissipation., , , , , and . ISCAS, page 1-5. IEEE, (2018)A Side-Channel Hardware Trojan Detection Method Based on Fuzzy C-Means Clustering and Fusion Distance Algorithms., , , , , and . IEEE Internet Things J., 11 (8): 13927-13937 (April 2024)A capacitive readout circuit with DC sensing method for micromachined gyroscopes., , , , and . NEMS, page 712-715. IEEE, (2012)An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control., , , , , , and . Sci. China Inf. Sci., 60 (4): 42402 (2017)Designing of a micromachined gyroscope system with a closed-loop DC biased interface ASIC., , , , , and . Sci. China Inf. Sci., 57 (10): 1-13 (2014)A CMOS compatible process for monolithic integration of high-aspect-ratio bulk silicon microstructures., , and . Sci. China Inf. Sci., 57 (8): 1-7 (2014)