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Characterization of prototype silicon pitch artifacts fabricated by scanning probe lithography and anisotropic wet etching

, , , , , , and . Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 23 (1): 66--71 (2005)

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Characterization of prototype silicon pitch artifacts fabricated by scanning probe lithography and anisotropic wet etching, , , , , , and . Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 23 (1): 66--71 (2005)