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Dual-Ring Method: Lateral Piezoelectric Coefficient (e31,f) Measurement on Unstructured Thin Films., , и . IEEE Trans. Instrum. Meas., (2023)Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review., , , , , , , , , и 1 other автор(ы). Sensors, 20 (14): 4054 (2020)Monitoring Lower Back Activity in Daily Life Using Small Unintrusive Sensors and Wearable Electronics in the Context of Rheumatic and Musculoskeletal Diseases., , и . Sensors, 21 (19): 6362 (2021)A Review on Coupled Bulk Acoustic Wave MEMS Resonators., , , , , , , , и . Sensors, 22 (10): 3857 (2022)Mechanically coupled ring-resonator filter and array (analytical and finite element model)., , , и . IET Comput. Digit. Tech., 10 (5): 261-267 (2016)Genetic Algorithm for the Design of Electro-Mechanical Sigma Delta Modulator MEMS Sensors., и . Sensors, 11 (10): 9217-9232 (2011)Analytical model of micromachining of brittle materials with sharp particles., , и . Microelectron. J., 36 (3-6): 608-611 (2005)Electro-Mechanical Co-optimization of MEMS Devices in Python., , , и . IEEE SENSORS, стр. 1-4. IEEE, (2020)A highly-linear, integration-compatible output metric for amplitude-modulated resonant sensors based on weakly-coupled resonators., , , , и . IEEE SENSORS, стр. 1-4. IEEE, (2020)Experimental evaluation of a pairwise broadcast synchronization in a low-power Cyber-physical system., , и . WiSNet, стр. 50-52. IEEE, (2015)