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Challenges of monolithic integration for SiGe MEMS technology., , , , and . IEEE SENSORS, page 1-3. IEEE, (2016)Micrometer-thin SOI Sensors for E-Skin Applications., , , , , , , and . IEEE SENSORS, page 1-4. IEEE, (2020)Development of microelectronic based biosensors., , , , , , , , , and 4 other author(s). CICC, page 505-512. IEEE, (2003)Ultra-Low Power High Temperature and Radiation Hard Complementary Metal-Oxide-Semiconductor (CMOS) Silicon-on-Insulator (SOI) Voltage Reference., , , , , and . Sensors, 13 (12): 17265-17280 (2013)A Networked Wearable Device for Chemical Multisensing., , , , , , , , , and 2 other author(s). Sensors, volume 539 of Lecture Notes in Electrical Engineering, page 17-24. Springer, (2018)Effects of Laser Operating Parameters on Piezoelectric Substrates Micromachining with Picosecond Laser., , and . Micromachines, 6 (1): 19-31 (2015)A 16×16 CMOS Capacitive Biosensor Array Towards Detection of Single Bacterial Cell., , and . IEEE Trans. Biomed. Circuits Syst., 10 (2): 364-374 (2016)Performances Evaluation of On-Chip Large-Size-Tapped Transformer for MEMS Applications., , , and . IEEE Trans. Instrum. Meas., 69 (9): 7051-7060 (2020)A MEMS resonant magnetometer based on capacitive detection., , , , and . SSD, page 1-5. IEEE, (2013)A Capacitance-to-Frequency Converter With On-Chip Passivated Microelectrodes for Bacteria Detection in Saline Buffers Up to 575 MHz., , , , and . IEEE Trans. Circuits Syst. II Express Briefs, 62-II (2): 159-163 (2015)