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Approach for the 3D-Alignment in Micro- and Nano-scale Assembly Processes., , , and . IPAS, volume 315 of IFIP Advances in Information and Communication Technology, page 167-173. Springer, (2010)AFM-based micro force sensor and haptic interface for a nanohandling robot., , and . IROS, page 1772-1777. IEEE, (2002)Development of a neural controller for motion control of a piezoelectric three-legged micromanipulation robot., and . IROS, page 788-793. IEEE, (1998)Automated robotic assembly for a micro-cartridge system inside the scanning electron microscope., , and . ICRA, page 5197-5202. IEEE, (2014)Online Precise Motion Measurement of 3-DOF Nanopositioners Based on Image Correlation., , , and . IEEE Trans. Instrumentation and Measurement, 68 (3): 782-790 (2019)Automated robotic manipulation of individual sub-micro particles using a dual probe setup inside the scanning electron microscope., , , and . ICRA, page 950-955. IEEE, (2015)A novel algorithm for defect extraction and classification of mobile phone screen based on machine vision., , , , and . Comput. Ind. Eng., (2020)Software for Small-scale Robotics: A Review., and . Int. J. Autom. Comput., 15 (5): 515-524 (2018)Robotic dual probe setup for reliable pick and place processing on the nanoscale using haptic devices., , and . IROS, page 892-897. IEEE, (2014)Development of a Force Microsensor for Robot-based Nanohandling., , , and . SyRoCo, volume 42 of IFAC Proceedings Volumes, page 609-614. International Federation of Automatic Control, (2009)