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Design and control of a single-chip SOI-MEMS atomic force microscope.

, , , и . ACC, стр. 2869-2874. IEEE, (2017)

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S O Müller

Majid Rezaei

Kianoosh Rezania

Georg Rezat

Ali Rezai-Sarkalateh

 

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Signal Transformation Approach to Tracking Control With Arbitrary References., и . IEEE Trans. Autom. Control., 57 (9): 2294-2307 (2012)Switched self-sensing actuator for a MEMS nanopositioner., , и . ICM, стр. 372-377. IEEE, (2017)Spatial system identification of a simply supported beam and a trapezoidal cantilever plate., и . IEEE Trans. Control. Syst. Technol., 11 (5): 726-736 (2003)Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners., и . IEEE Trans. Control. Syst. Technol., 14 (1): 33-44 (2006)Control orientated synthesis of high-performance piezoelectric shunt impedances for structural vibration control., и . IEEE Trans. Control. Syst. Technol., 13 (1): 98-112 (2005)Characterization of piezoresistive and electrothermal sensors in MEMS devices., и . IEEE SENSORS, стр. 1-3. IEEE, (2016)Spatial control of flexible structures - application of spatial H∞ control to a piezoelectric laminate beam., и . ACC, стр. 4085-4090. IEEE, (2001)A 12-electrode piezoelectric tube scanner for fast atomic force microscopy., , и . ACC, стр. 4957-4962. IEEE, (2010)Resonant control of structural vibration using charge-driven piezoelectric actuators., и . CDC, стр. 5368-5373. IEEE, (2004)PPF Control of a Piezoelectric Tube Scanner., , , и . CDC/ECC, стр. 1168-1173. IEEE, (2005)