%0 Journal Article %1 journals/ieicet/NagasawaHSHAFYTT14 %A Nagasawa, Shuichi %A Hinode, Kenji %A Satoh, Tetsuro %A Hidaka, Mutsuo %A Akaike, Hiroyuki %A Fujimaki, Akira %A Yoshikawa, Nobuyuki %A Takagi, Kazuyoshi %A Takagi, Naofumi %D 2014 %J IEICE Trans. Electron. %K dblp %N 3 %P 132-140 %T Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation. %U http://dblp.uni-trier.de/db/journals/ieicet/ieicet97c.html#NagasawaHSHAFYTT14 %V 97-C

@article{journals/ieicet/NagasawaHSHAFYTT14, added-at = {2020-12-29T00:00:00.000+0100}, author = {Nagasawa, Shuichi and Hinode, Kenji and Satoh, Tetsuro and Hidaka, Mutsuo and Akaike, Hiroyuki and Fujimaki, Akira and Yoshikawa, Nobuyuki and Takagi, Kazuyoshi and Takagi, Naofumi}, biburl = {https://www.bibsonomy.org/bibtex/2f903f72dda86c78671a4a5bf3c80fba9/dblp}, ee = {https://www.wikidata.org/entity/Q62574570}, interhash = {c3b4dd986dc5139bbb2c27abcdaea733}, intrahash = {f903f72dda86c78671a4a5bf3c80fba9}, journal = {IEICE Trans. Electron.}, keywords = {dblp}, number = 3, pages = {132-140}, timestamp = {2024-04-08T15:46:36.000+0200}, title = {Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation.}, url = {http://dblp.uni-trier.de/db/journals/ieicet/ieicet97c.html#NagasawaHSHAFYTT14}, volume = {97-C}, year = 2014 }