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Improving the integrity of Ti barrier layer in Cu-TSVs through self-formed TiSix for via-last TSV technology., , , , , и . 3DIC, стр. 1-4. IEEE, (2016)Advanced 2.5D/3D hetero-integration technologies at GINTI, Tohoku University., , , , и . 3DIC, стр. FS2.1-FS2.5. IEEE, (2015)A study on multipath propagation characteristics for RAKE receiving technique.. PIMRC, стр. 711-714. (1994)Oxide-Oxide Thermocompression Direct Bonding Technologies with Capillary Self-Assembly for Multichip-to-Wafer Heterogeneous 3D System Integration., , , , , , , , и . Micromachines, 7 (10): 184 (2016)Impact of Super-long-throw PVD on TSV Metallization and Die-to-Wafer 3D Integration Based on Via-last., , , , , , , , и . 3DIC, стр. 1-4. IEEE, (2023)A parallel ADC for high-speed CMOS image processing system with 3D structure., , , , , , и . 3DIC, стр. 1-4. IEEE, (2009)Micro-Raman spectroscopy analysis and capacitance - time (C-t) measurement of thinned silicon substrates for 3D integration., , , , , , , , и . 3DIC, стр. 1-5. IEEE, (2009)Investigation of the Underfill with Negative-Thermal-Expansion Material to Suppress Mechanical Stress in 3D Integration System., , и . 3DIC, стр. 1-4. IEEE, (2019)Impacts of Deposition Temperature and Annealing Condition on Ozone-Ethylene Radical Generation-TEOS-CVD SiO2 for Low-Temperature TSV Liner Formation., , , , , , , и . 3DIC, стр. 1-4. IEEE, (2019)Consideration of microbump layout for reduction of local bending stress due to CTE Mismatch in 3D IC., , , , , , , и . 3DIC, стр. TS8.26.1-TS8.26.4. IEEE, (2015)